Trace oxygen measurements for UHP gases in semiconductor manufacture

Ultra-High Purity (UHP) gases bulk gas piping distribution systems

The requirement for faster, higher capacity semiconductor components is driving the semiconductor process technology limits. Due to the demand for higher purity in semiconductor processes UHP gases specifications have been improved resulting in extremely low limits for impurities.

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Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of N2, H2, Ar carrier gases0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of N2, H2, Ar carrier gases0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 10 ppm O2N2, H2, Ar GPR-1600
Application/ServiceMeasurementGas StreamAnalyzer Options
Non-invasive leak detection in UHP gas distribution systems with mobile cart0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Non-invasive leak detection in UHP gas distribution systems with mobile cart0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
O2 deficiency in confined areas<19.5-20.0% O2Air, N2 GPR-35
Application/ServiceMeasurementGas StreamAnalyzer Options
ppm purity cryogenic, ceramic membrane, pressure swing adsorption (PSA) skid and deoxo-catalytic generated N2 (5 nines) for wafer oxidation furnaces0-10 ppm O2N2, H2 GPR-1600
Spot Checking
GPR-1200
Application/ServiceMeasurementGas StreamAnalyzer Options
Ultra High Purity N2 for heat treating silicon wafers0 to 100 ppb O2N2, H2, Ar PI2-UHP100
 
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Analytical Industries Inc.
2855 Metropolitan Place,
Pomona, CA, 91767
USA
909-392-6900