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Trace oxygen measurements for UHP gases in semiconductor manufacture

Ultra-High Purity (UHP) gases bulk gas piping distribution systems

The requirement for faster, higher capacity semiconductor components is driving the semiconductor process technology limits. Due to the demand for higher purity in semiconductor processes UHP gases specifications have been improved resulting in extremely low limits for impurities.

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Application/ServiceMeasurementGas StreamAnalyzer Options
Personnel protection against O2 deficiency in confined spaces.<19.5-20.0% O2Air, N2 GPR-35
Application/ServiceMeasurementGas StreamAnalyzer Options
Monitoring for oxygen contamination of UHP N2, H2, Ar carrier gases0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Non-invasive leak detection in UHP gas distribution systems with mobile cart to less than 100ppb O20 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Monitoring oxygen contamination of UHP H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Monitoring trace oxygen in wafer oxidation furnaces0-10 ppm O2N2, H2 GPR-1600
Spot Checking
GPR-1200
Application/ServiceMeasurementGas StreamAnalyzer Options
Monitoring O2 contamination of high purity H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Monitoring for O2 contamination of high purity N2, H2, Ar carrier gases0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Leak detection in pure gas pipelines with mobile cart to less than 1ppm O20 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Measuring trace oxygen levels in H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 10 ppm O2N2, H2, Ar GPR-1600
Application/ServiceMeasurementGas StreamAnalyzer Options
Measuring O2 in ultra high purity N2 for heat treating silicon wafers0 to 100 ppb O2N2, H2, Ar PI2-UHP100
 
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Analytical Industries Inc.
2855 Metropolitan Place,
Pomona, CA, 91767
USA
909-392-6900
What we do
Analytical Industries Inc manufactures high-quality electrochemical oxygen sensors and gas analyzers for industrial process control as well as breathing air for diving and medical treatment.